Two-axis electromagnetic microscanner for high resolution displays

YALÇINKAYA A. D., Urey H., Brown D., Montague T., Sprague R.

Journal of Microelectromechanical Systems, cilt.15, sa.4, ss.786-794, 2006 (SCI-Expanded, Scopus) identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 15 Sayı: 4
  • Basım Tarihi: 2006
  • Doi Numarası: 10.1109/jmems.2006.879380
  • Dergi Adı: Journal of Microelectromechanical Systems
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Sayfa Sayıları: ss.786-794
  • Boğaziçi Üniversitesi Adresli: Evet

Özet

A novel microelectromechanical systems (MEMS) actuation technique is developed for retinal scanning display and imaging applications allowing effective drive of a two-axes scanning mirror to wide angles at high frequency. Modeling of the device in mechanical and electrical domains, as well as the experimental characterization is described. Full optical scan angles of 65° and 53° are achieved for slow (60 Hz sawtooth) and fast (21.3 kHz sinusoid) scan directions, respectively. In combination with a mirror size of 1.5 mm, a resulting θoptD product of 79.5 deg·mm for fast axis is obtained. This two-dimensional (2-D) magnetic actuation technique delivers sufficient torque to allow non-resonant operation as low as dc in the slow-scan axis while at the same time allowing one-atmosphere operation even at fast-scan axis frequencies large enough to support SXGA (1280 × 1024) resolution scanned beam displays. © 2006 IEEE.