Route to batch-compatible fabrication of nanotweezers by guided self-assembly

Sardan O., Alaca B. E., YALÇINKAYA A. D., Bøggild P., Tang P. T., Hansen O.

2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Hong Kong, Çin, 2 - 05 Ağustos 2007, ss.1231-1234, (Tam Metin Bildiri) identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Doi Numarası: 10.1109/nano.2007.4601405
  • Basıldığı Şehir: Hong Kong
  • Basıldığı Ülke: Çin
  • Sayfa Sayıları: ss.1231-1234
  • Anahtar Kelimeler: MEMS/NEMS, Micro-nano integration, Nanowires, Self-assembly
  • Boğaziçi Üniversitesi Adresli: Evet

Özet

Fabrication of integrated micro and nanoscale components in a single batch is one of the biggest challenges for nanosystems developement. A self-assembly technique that enables "batch-compatible" integration of micro electro mechanical systems with nanoribbons is presented by demonstrating electrostatically actuated combdrive microgrippers with nanoribbon end-effectors. Preliminary fabrication results demonstrate the possibility of obtaining well defined spatial density and orientation of nanoribbons matching the precision of top-down techniques and at the same time allowing complete alignment and registry with subsequent lithography steps. © 2007 IEEE.