Batch fabrication of self-assembled nickel-iron nanowires by electrodeposition

Sardan O., YALÇINKAYA A. D., Alaca B. E.

1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS, Zhuhai, Çin, 18 - 21 Ocak 2006, ss.1101-1104, (Tam Metin Bildiri) identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Doi Numarası: 10.1109/nems.2006.334640
  • Basıldığı Şehir: Zhuhai
  • Basıldığı Ülke: Çin
  • Sayfa Sayıları: ss.1101-1104
  • Anahtar Kelimeler: Batch-compatibility, Electroplating, Guided self-assembly, Micronano integration, Nanofabricalion, Nanowires
  • Boğaziçi Üniversitesi Adresli: Evet

Özet

Lack of batch-compatible fabrication techniques can be considered as the most important challenge in the integration of nanostructures with microelectromechanical systems (MEMS). A solution to the micro-nano integration problem is offered by introducing a batch-compatible nanowire fabrication technique based on basic lithographic techniques and guided self-assembly. The basic principle is obtaining cracks at predetermined locations in a sacrificial SiO2 layer on Si and filling these cracks with a suitable metal by electrodeposition. The technique is demonstrated by using Nickel-Iron as the deposition material and verifying the magnetic behavior of resulting nanowires. © 2006 IEEE.