NiFe plated biaxial MEMS scanner for 2-D imaging

YALÇINKAYA A. D., Urey H., Holmstrom S.

IEEE Photonics Technology Letters, cilt.19, sa.5, ss.330-332, 2007 (SCI-Expanded, Scopus) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 19 Sayı: 5
  • Basım Tarihi: 2007
  • Doi Numarası: 10.1109/lpt.2007.891592
  • Dergi Adı: IEEE Photonics Technology Letters
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Sayfa Sayıları: ss.330-332
  • Anahtar Kelimeler: Displays, Electromagnetic actuator, Microelectromechanical systems (MEMS), Microsystems, Microtechnology
  • Boğaziçi Üniversitesi Adresli: Evet

Özet

A two-axis microelectromechanical systems micromirror actuator is developed for retinal scanning display and imaging applications. The device operation makes use of magnetostatic torque produced by the combination of a flux generating custom-made high-frequency electrocoil and the NiFe layer deposited on the movable part. Modeling of the actuation in the magnetic domain, as well as the experimental characterization of the mechanical part is described. The device is capable of full optical scan angles of 88° (at 100-mA root-mean-square coil current) and 1.8° for slow and fast-scan directions, respectively. In combination with a mirror size of 1.5 mm, resulting θopt · D products are 132° ·mm and 2.7 · mm for slow and fast axis, respectively. Atmospheric operation of the device is enabled due to high mechanical quality factors of the order of 3000. © 2007 IEEE.