Gas Flow Sensing with a Piezoresistive Silicon Nanowire-Based MEMS Force Sensor

Demirkazik L., Kerimzade U., Ghourichaei M. J., Aydin O., Aksoy B., Aydogan C., ...Daha Fazla

38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025, Kao-hsiung, Tayvan, 19 - 23 Ocak 2025, ss.809-812, (Tam Metin Bildiri) identifier identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Doi Numarası: 10.1109/mems61431.2025.10917650
  • Basıldığı Şehir: Kao-hsiung
  • Basıldığı Ülke: Tayvan
  • Sayfa Sayıları: ss.809-812
  • Anahtar Kelimeler: Flow sensing, Force Sensor, Silicon Nanowire, Piezoresistive, Low Power
  • Boğaziçi Üniversitesi Adresli: Evet

Özet

This paper introduces a novel flow sensor involving suspended piezoresistive silicon nanowires embedded in a MEMS platform. A highly linear response with a sensitivity of 6.26×10-4 (m/s)-1 is achieved within the velocity range of about 20 - 40 m/s. This translates to a very high sensitivity per effective sensing area, 7.37 ppm (m/s)-1 μm-2, and 1 nW power consumption, while operating over a velocity range similar to conventional bulky cantilever and diaphragm-based sensors. Further characterization performed at varying distances above the sensor surface demonstrates a spatial sensitivity of 4.90×10-3 mm-1. Sensor design enables high-density array operation where each MEMS unit acts as a force measurement pixel to analyze velocity gradients in various microfluidic flows with minimized power consumption and footprint.