Selectively thinned stainless steel scanners through electrical discharge machining

Usta B. K., Gokdel Y., Mutlu Ş., YALÇINKAYA A. D.

16th International Conference on Optical MEMS and Nanophotonics, OMN2011, İstanbul, Türkiye, 8 - 11 Ağustos 2011, ss.179-180, (Tam Metin Bildiri) identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Doi Numarası: 10.1109/omems.2011.6031070
  • Basıldığı Şehir: İstanbul
  • Basıldığı Ülke: Türkiye
  • Sayfa Sayıları: ss.179-180
  • Anahtar Kelimeler: Electrical discharge machining, optical scanners
  • Boğaziçi Üniversitesi Adresli: Evet

Özet

In this work, a simple method using electric discharge machining (EDM) is exploited for three-dimensional fabrication of stainless steel scanners. Wire-EDM is used to define the device contours and sinker-EDM is used to selectively thin parts of the scanner. Fast and slow axis total optical scan angles are measured as 1.6° at 10.875 kHz and 78° at 236 Hz, respectively. © 2011 IEEE.