NiFe plated biaxial magnetostatic MEMS scanner

YALÇINKAYA A. D., Urey H., Holmstrom S.

4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, Fransa, 10 - 14 Haziran 2007, ss.1517-1520, (Tam Metin Bildiri) identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Doi Numarası: 10.1109/sensor.2007.4300433
  • Basıldığı Şehir: Lyon
  • Basıldığı Ülke: Fransa
  • Sayfa Sayıları: ss.1517-1520
  • Anahtar Kelimeler: Electromagnetic actuation, Micro-scanner, MOEMS
  • Boğaziçi Üniversitesi Adresli: Evet

Özet

A two axis Microelectromechanical System (MEMS) micromirror actuator is developed for display and imaging applications. The device operates on the principle of generated magnetostatic torque by a flux generating high-frequency electro coil and a magnetic layer deposited on the movable part. The device can supply full optical scan angles of 88° (at 100 mA drive current) and 1.8° for slow and fast scan directions, respectively. Using a mirror size of 1.5 mm, θopt·D products of 132 deg·mm and 2.7 deg·mm for slow and fast axis are achieved, respectively. The scanner can be operated in air due to high mechanical quality factors of the order of 3000. ©2007 IEEE.