Two-axis MEMS scanner for display and imaging applications

Urey H., YALÇINKAYA A. D., Montague T., Brown D., Sprague R., Anac O., ...Daha Fazla

IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications, Oulu, Finlandiya, 1 - 04 Ağustos 2005, ss.17-18, (Tam Metin Bildiri) identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Doi Numarası: 10.1109/omems.2005.1540054
  • Basıldığı Şehir: Oulu
  • Basıldığı Ülke: Finlandiya
  • Sayfa Sayıları: ss.17-18
  • Boğaziçi Üniversitesi Adresli: Evet

Özet

Two-axis gimbaled scanner used in an SVGA display product with 58deg optical scan angle, 1.5mm mirror size, and 21.KHz resonant frequency is reported. Scanner is actuated electromagnetically using a single coil on the outer frame and by mechanical coupling of outer frame motion into the inner mirror frame. © 2005 IEEE.