Akademik Veri Yönetim Sistemi
Nanotechnology, cilt.18, sa.37, 2007 (SCI-Expanded, Scopus)
A batch-compatible integration of micro-electro-mechanical systems (MEMS) with nanoscale objects is demonstrated using the example of a gripping device with nanoscale end-effectors. The proposed nanofabrication technique is based on creating a certain number of nanowires/ribbons on a planar surface, each with a known orientation, using self-assembled crack networks as a template. Since both the location and orientation of the nanowires/ribbons are known, the gripping device can be lithographically transferred on to the substrate ensuring full integration of MEMS with nanoscale end-effectors. Two nanowires/ribbons are attached to each MEMS solely at desired locations with a desired inclination in contrast to most other self-assembly-based techniques of growing nanoscale objects. Challenges unique to MEMS fabrication are encountered raising process requirements beyond those of the simple electrode-nanowire integration. With issues related to yield and end-effector geometry remaining to be studied further, the method proposes a true batch fabrication for nanoscale objects and their integration with MEMS, which does not require the use of nano-lithographic techniques. © IOP Publishing Ltd.