Fabrication of integrated metallic MEMS devices

YALÇINKAYA A. D., Ravnkilde J., Hansen O.

Electronics Letters, cilt.38, sa.24, ss.1526-1527, 2002 (Scopus) identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 38 Sayı: 24
  • Basım Tarihi: 2002
  • Doi Numarası: 10.1049/el:20021032
  • Dergi Adı: Electronics Letters
  • Derginin Tarandığı İndeksler: Scopus
  • Sayfa Sayıları: ss.1526-1527
  • Boğaziçi Üniversitesi Adresli: Evet

Özet

A simple and complementary metal oxide semiconductor (CMOS) compatible fabrication technique for microelectromechanical (MEMS) devices is presented. The fabrication technology makes use of electroplated metal layers. Among the fabricated devices, high quality factor microresonators are characterised with respect to the quality factor.