Characterization of a hybrid nanowire-MEMS force sensor using direct actuation

Pruchnik B., Kwoka K., Piasecki T., Ghourichaei M. J., Kerimzade U., Aydin O., ...Daha Fazla

Measurement Science and Technology, cilt.36, sa.7, 2025 (SCI-Expanded, Scopus) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 36 Sayı: 7
  • Basım Tarihi: 2025
  • Doi Numarası: 10.1088/1361-6501/adeac6
  • Dergi Adı: Measurement Science and Technology
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Chemical Abstracts Core, Compendex, INSPEC
  • Anahtar Kelimeler: nanowire, MEMS, sensors, actuation, SiNW, Lab-in-SEM, LiS
  • Boğaziçi Üniversitesi Adresli: Evet

Özet

In this study, we describe a process of characterization of a 3-axial force sensor with piezoresistive silicon nanowires. We present a unique method for determining the gauge factor (GF) of a volumetric structure with a stiffness exceeding 105N m−1 and resonant frequencies above 10 MHz. We employed an uncommon Lab-in-Scanning Electron Microscope (Lab-in-SEM, LIS) approach to perform a full characterization schedule under vacuum conditions using direct actuation with nanomanipulators. We discuss the force evaluation errors arising from the sample support stiffness. Finally, we present the results of GF measurements of the multi-axially investigated device with GF of over 20 for axial and over 40 for transverse loading.