LED integrated miniaturized polymer MEMS display

Gokdel Y. D., Sarioglu B., YALÇINKAYA A. D.

PRIME - 4th Ph.D. Research in Microelectronics and Electronics Conference 2008, İstanbul, Türkiye, 22 - 25 Haziran 2008, ss.93-96, (Tam Metin Bildiri) identifier identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Doi Numarası: 10.1109/rme.2008.4595733
  • Basıldığı Şehir: İstanbul
  • Basıldığı Ülke: Türkiye
  • Sayfa Sayıları: ss.93-96
  • Boğaziçi Üniversitesi Adresli: Evet

Özet

This study presents the process development and first experimental results of LED integrated polymer microelectromechanical systems (MEMS) for two-dimensional displays. Proposed integrated system is very cheap due to the fabrication simplicity and the choice of polymer material as the structural layer, and it is a strong candidate to show similar performance when compared with the existing flat panel displays. A process technology that enables the integration of the LED dies and the PCB-based MEMS structure is presented. The very first version of the MEMS structure is actuated by consuming 11.5 mW and resulting displacement is measured to be 9 mm. Along with the LED die size of 250 μm × 250 μm, 36 pixels of resolution can be achieved. © 2008 IEEE.